Micromachined Precision Inertial Instruments

Abstract

This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications. During the project timeline in-plane, out-of-plane and monolithic 3-axis accelerometers have been developed with their interface electronics. Analysis, simulation, fabrication, and testing techniques for these accelerometer systems have been developed.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2003
Accession Number
ADA419850

Entities

People

  • Khalil Najafi

Organizations

  • University of Michigan

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms
  • Sensors

DTIC Thesaurus Topics

  • Air Force Research Laboratories
  • Aspect Ratio
  • Assembly
  • Control Systems
  • Electron Beam Lithography
  • Electronics
  • Fabrication
  • Guidance
  • Manufacturing
  • Measurement
  • Microelectromechanical Systems
  • Micromachining
  • Navigation
  • Resonant Frequency
  • Semiconductor Manufacturing
  • Simulations
  • Single Crystals

Fields of Study

  • Physics

Readers

  • Inertial Navigation Systems.
  • Integrated Circuit Design and Technology.
  • Materials Science (Mechanical Engineering).

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems