MEMS Based Fuzing/Safety and Arming Systems

Abstract

Microelectromechanical Systems or MEMS is a fabrication technology for creating mechanical devices on micron scale (1x10(exp-6) meters). But MEMS is more than miniaturization. By combining, photolithography, deposition, patterning and etching a fabrication technology has resulted for the production full-assembled, integrated electromechanical systems on a scale once reserved for electronic integrated circuits (IC). As the first M of MEMS implies, individual features are on the micron scale that is 10(exp-6) meters but the resulting systems can be several millimeters in size.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 2004
Accession Number
ADA425423

Entities

People

  • Paul J. Smith

Organizations

  • Naval Surface Warfare Center Indian Head Division

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors
  • Space
  • Weapons Technologies

DTIC Thesaurus Topics

  • Construction
  • Control Systems
  • Energetic Materials
  • Environment
  • Etching
  • Explosives
  • Fabrication
  • Frequency Shift
  • Integrated Circuits
  • Machining
  • Manufacturing
  • Materials
  • Mechanical Structure
  • Microelectromechanical Systems
  • Photolithography
  • Tuned Circuits
  • Very Large Scale Integration

Readers

  • Integrated Circuit Design and Technology.
  • Mathematics or Statistics

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems