Temperature Variation of Actuation Voltage in Capacitive MEMS Switches
Abstract
A simple theoretical model for temperature variation of actuation voltage for fixed-fixed beam switches is developed and applied to model capacitive RF MEMS switches. Measured data from these switches fits very well with the model over a 120 degrees C operating temperature range, while demonstrating a 3x reduction in variation compared to previous publications. The proposed model provides valuable insight into the factors impacting variability of actuation voltage over broad temperature ranges.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2005
- Accession Number
- ADA431049
Entities
People
- Charles L. Goldsmith
- David I. Forehand