Single Molecular Detection via Micro-Scale Polymeric Opto-Electro-Mechanical Systems
Abstract
The BioPOEMS (Bio-Polymer-Opto-Electro-Microfluidic-System) Group at the University of CA at Berkeley has developed three novel microfabricated, ultra-sensitive, opto-electro-mechanical systems for 'on-chip' optical detection. A micro Confocal Imaging Array (microCIA) system, a miniaturized Total Internal Reflection (mTIR) system and a Self- aligned Integrated Microfluidic Optical System (SI-MOS) have been fabricated to detect single molecules. Several Micro ElectroMechanical System (MEMS) opto-mechanical components and subsystems have been demonstrated, including stacked 2-D microlens scanners, vertically actuated lens devices for focal plane control, polydimethylsiloxane (PDMS) disposable chips with self-aligned objective lenses, multilayer chips with micromirror sidewalls for TIR excitation and polymer-based microactuators for sample handling.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2005
- Accession Number
- ADA436118
Entities
People
- Albert P. Pisano
- Daniel T. Chiu
- Lisa A. Pruitt
- Luke P Lee
Organizations
- University of California, Berkeley