MEMS Shear Stress Sensor

Abstract

A micro electro mechanical system (MEMS) was designed, manufactured, and vibrationally tested. The system consisted of a multitude of nearly identical shear stress sensors. The resonant frequency was measured to 57 sensors with a mean frequency of 90.037 KHZ and a standard deviction of 0.297 KHZ. Although attempted in water, only the air measurements were conducted.

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Document Details

Document Type
Technical Report
Publication Date
Dec 21, 2005
Accession Number
ADA462857

Entities

People

  • Aman Haque
  • Amit Desai
  • Michael Jonson
  • Samuel Benedit
  • Todd Ziegler

Organizations

  • Pennsylvania State University

Tags

Communities of Interest

  • Sensors

DTIC Thesaurus Topics

  • Abstracts
  • Engineering
  • Frequency
  • Information Operations
  • Instructions
  • Measurement
  • Mechanical Engineering
  • Military Research
  • Resonant Frequency
  • Shear Stresses
  • Standards
  • Stresses

Readers

  • Optical Fiber Sensing and Electromagnetic Propagation.
  • Radar Systems Engineering.
  • Reinforced Composite Materials

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems