Q5 Known Good Substrates

Abstract

The Known Good Substrates (KGS) program is on track technically and financially with program tasks. A no-cost time extension was processed from February to March 31, 2007. The remaining Q3 and Q4 wafers were delivered after a delay due to equipment down time. Q4 wafer metrology and characterization was completed. Results are reported from first device fabrication lots. Many subcontractors are ramping down activities as their work nears completion.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Feb 27, 2007
Accession Number
ADA463083

Entities

People

  • Brian Russell
  • Eric Carlson
  • Gilyong Chung
  • Mark Loboda

Tags

DTIC Thesaurus Topics

  • Contractors
  • Contracts
  • Crystal Growth
  • Crystals
  • Data Analysis
  • Demographic Cohorts
  • Diameters
  • Electronic Mail
  • Fabrication
  • Materials
  • Measurement
  • Metrology
  • Program Management
  • Radio Frequency Devices
  • Silicon Carbide
  • Substrates
  • X Rays

Readers

  • Clinical Trial Research.
  • Nanofabrication and Microfabrication.