Transfer of Fabrication of Universal MEMS Integrated Dual-Spring (UMIDS) Process to a Distributed Fabrication Network

Abstract

Spawar has been developing a process sequence called the "Universal MEMS Integrated Dual-Spring"(UMlDS) for several years. This process has shown promise for the fabrication of extremely sensitive inertial sensor devices. Under this effort, Spawar researchers were tasked with the transfer of the UMIDS process to the DARPA-established MEMS Exchange program at the Corporation for National Research Initiatives (CNRI) in Reston Virginia. Specifically, Spawar provided to the MEMS Exchange the process sequence, device designs, and various process details and parameters to provide a starting point to allow the MEMS Exchange to fabricate accelerators using the UMIDS process. This final report outlines our efforts and the results of the fabrication of the accelerator devices made using the Spawar UMIDS process. The UMIDS process was successfully transferred to the MEMS Exchange.

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Document Details

Document Type
Technical Report
Publication Date
Aug 15, 2008
Accession Number
ADA485921

Entities

People

  • Mehmet Ozgur
  • Michael Huff

Organizations

  • Corporation for National Research Initiatives

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Antireflection Coatings
  • Coatings
  • Contracts
  • Corporations
  • Department Of Defense
  • Fabrication
  • Governments
  • Microelectromechanical Systems
  • Optical Materials
  • Sequences
  • Silica Glass
  • Standards
  • Virginia

Readers

  • Computer Engineering
  • Inertial Navigation Systems.
  • Maritime and Naval Warfare Studies