4H-SiC Power Bipolar Junction Transistor with a Very Low Specific On-resistance of 2.9 mOmega.cm2

Abstract

This paper reports a newly achieved best result on the specific on-resistance (Rsp,on) of power 4H-SiC bipolar junction transistors (BJT). A 4H-SiC BJT based on a 12 um drift-layer shows a record low specific-on resistance of only 2.9 mOMEGA.sq cm, with an open base collector-to-emitter blocking voltage (Vceo) of 757 V, and a current gain of 18.8. The active area of this 4H-SiC BJT is 0.61 sq mm, and it has a fully inter-digitated design. This high performance 4H-SiC BJT conducts up to 5.24 A at a forward voltage drop of Vce = 2.5 V, corresponding to a low Rsp_on of 2.9 mOMEGA.sq cm up to Jc=859A/sq cm. This is the lowest specific on-resistance ever reported for high power 4H-SiC BJTs.

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Document Details

Document Type
Technical Report
Publication Date
Apr 12, 2006
Accession Number
ADA521923

Entities

People

  • Jian H. Zhao
  • Jianhui Zhang
  • Petre Alexandrov
  • Terry Burke

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bipolar Junction Transistors
  • Ceramic Materials
  • Compound Semiconductors
  • Electronics
  • Etching
  • Fabrication
  • High Temperature
  • Materials
  • Materials Science
  • Metal-Semiconductor Junctions
  • New Brunswick
  • Power Electronics
  • Resistance
  • Semiconductor Devices
  • Semiconductors
  • Silicon Carbide
  • Transistors

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology