Harsh Environment Wireless MEMS Sensors for Energy & Power Open PDF Document Details Document Type Technical Report Publication Date Mar 01, 2009 Accession Number ADA529236 Entities People Albert P. Pisano Organizations University of California, Berkeley Tags Communities of Interest Advanced Electronics Sensors DTIC Thesaurus Topics Accelerometers Ceramic Materials Circuits Combustion Computer Science Detectors Electrical Engineering Engineering Environment Frequency Fuel Efficiency Fuels High Temperature Materials Oxygen Sensors Semiconductors Silicon Carbide