Fabrication of Microstructures on Photosensitive Glass using a Femtosecond Laser Process and Chemical Etching

Abstract

In this study a method for the fabrication of microstructures on the surface of an inside photosensitive glass by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in 8% HF acid solution for chemical etching. The results demonstrated that the etching time, scanning speed, and laser power are important parameters in the fabrication of microstructures and inner structures on photosensitive glass. In future, inner microstructures could be applied in the fields of biomedicine and cell detection.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2009
Accession Number
ADA540567

Entities

People

  • C. W. Cheng
  • C. W. Chien
  • J. S. Chen
  • P. X. Lee

Organizations

  • National Chung Cheng University

Tags

Communities of Interest

  • Biomedical

DTIC Thesaurus Topics

  • Advanced Materials
  • Charge Coupled Devices
  • Chemical Etching
  • Etching
  • Fabrication
  • Femtosecond Lasers
  • Femtosecond Time
  • Heat Energy
  • Heat Treatment
  • Laser Beams
  • Lasers
  • Materials
  • Materials Processing
  • Micro-Machines
  • Microstructure

Fields of Study

  • Materials science

Readers

  • Optical Physics and Photonics.
  • Surface Coatings Technology.

Technology Areas

  • Directed Energy