High kappa Dielectrics on InGaAs and GaN - Growth, Interfacial Structural Studies, and Surface Fermi Level Unpinning
Abstract
This is the report of a project to maintain world-leading expertise of high-k dielectric growth on InGaAs and GaN, including high-k enhancement, surface Fermi level unpinning, oxide scaling to < 1 nm, and high temperature thermal stability.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 20, 2011
- Accession Number
- ADA541513
Entities
People
- Minghwei Hong
Organizations
- National Tsing Hua University