Smart Surfaces and Interfaces
Abstract
A Smart die coating based on AlN piezoleectric thin film sensor embedded into a tribological coating system is been investigated in this research program. Thin film sensor design and its overal incorporation within the coating system are explained briefly. Piezoelectric AlN thin film with highly preffered (002) orienattaion has been deposited by pulsed closed field unbalanced magnetron sputtering system using Cr as the electrode/adhesion layer. The effect of working pressure on residual stress and (002) orienataion of AlN thin film is discussed together with gas ratio effect on the piezoelectric measurements. Piezo-response of AlN thin films were characterized by lock-in-amplifier, which measures the output piezo-voltage of AlN thin film under cyclic loading condition using a micro-actuator.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 01, 2010
- Accession Number
- ADA562244
Entities
People
- Dan Knauss
- John J. Moore
- Ryan O'Hayre
Organizations
- Colorado School of Mines