Two-Dimensional Array of Coupled Nanomechanical Resonators

Abstract

Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our 20 x 20 array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed.

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Document Details

Document Type
Technical Report
Publication Date
Apr 03, 2006
Accession Number
ADA609221

Entities

People

  • Brian H. Houston
  • Jeevak M. Parpia
  • Jeffrey W. Baldwin
  • Martin H. Marcus
  • Maxim K. Zalalutdinov
  • Robert B. Reichenbach

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acoustic Waves
  • Complementary Metal-Oxide Semiconductors
  • Crystal Lattices
  • Detection
  • Detectors
  • Elastic Waves
  • Electron Beam Lithography
  • Fabrication
  • Frequency
  • Frequency Bands
  • Geometry
  • Group Velocity
  • Radio Frequency
  • Resonators
  • Signal Processing
  • Solid State Physics
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Structural Dynamics.

Technology Areas

  • Directed Energy