Plasma Jet Interactions with Liquids in Partial Fulfillment of an NRL Karle's Fellowship

Abstract

Plasmas are a powerful medium that have enabled technologies across a wide spectrum of interdisciplinary fields due to their ability to synthesize (e.g., coatings and thin film deposition), modify (e.g., chemical functionalization), and etch (in Si technology) materials. In low pressure non-equilibrium discharge plasmas, associated with the above processes, the electron population is much more energetic than both the ions and neutral gas background in which the plasma is created, which allows them to sustain the plasma and also drive the production of reactive neutral and excited species. Understanding and controlling plasma species production, their delivery to the surface, and the response of the surface have been and will continue to be crucial to the advancements of these fields.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Nov 30, 2015
Accession Number
ADA627194

Entities

People

  • Sandra Hangarter

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Barometric Pressure
  • Charged Particles
  • Chemical Reactions
  • Chemistry
  • Electrons
  • Free Electrons
  • Frequency
  • Ionization
  • Ions
  • Liquid Phases
  • Liquids
  • Materials
  • Measurement
  • Microsecond Time
  • Particle Physics
  • Plasma Jets
  • Protons

Readers

  • Nanocomposite Materials Science
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene