Radiofrequency Glow Discharges Used for Optical Emission Spectroscopy: An Experimental and Analytical Approach
Abstract
Glow discharge optical emission spectroscopy (GD-OES) is an analytical technique widely used for elemental and depth profiling analysis of materials 1. The technique is based on the analysis of the optical emission of atoms sputtered from the cathode and excited in the plasma. Radio frequency excitation of the glow discharge (RF-GD-OES) is developed for quantitative analysis of non-conductive samples. Capacitively coupled radio frequency discharges have been extensively studied both experimentally and theoretically over the past decade in the context of plasma processing for the microelectronics industry and thus these discharges are fairly well understood 2-3. The operating conditions used in RF-GDOES are, however, different than those standardly used in plasma processing, leading to a discharge behavior quite unusual and it is our aim to understand this behavior.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 20, 2003
- Accession Number
- ADP014990
Entities
People
- L. Therese
- Ph. Belenguer
- Ph. Guillot