MEMS AND INTEGRATED MICROSYSTEMS TECHNOLOGY

Abstract

The MicroElectroMechanical Systems (MEMS) and Integrated Microsystems Technology program is a broad, cross-disciplinary initiative to merge computation and power generation with sensing and actuation to realize a new technology for both perceiving and controlling weapons systems and battlefield environments. Using fabrication processes and materials similar to those used to make microelectronic devices, MEMS applies the advantages of miniaturization, multiple components and integrated microelectronics to the design and construction of integrated electromechanical and electro-chemical-mechanical systems. The MEMS program addresses issues ranging from the scaling of devices and physical forces to new organization and control strategies for distributed, high-density arrays of sensor and actuator elements. These issues include microscale power and actuation systems as well as microscale components that survive harsh environments. Thermal management technologies will develop heat resistant thermal layers to provide efficient operation for cooling electronic devices. The current focus in micro technologies is to improve navigation, position and timing capabilities for uncompromised navigation and positioning in today's dynamic military field of operations.

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Document Details

Document Type
Project
Publication Date
Oct 01, 2015
Source ID
MT-12_0603739E_3_0400_PB_2015

Tags

Readers

  • Defense Technology Research and Development.
  • Inertial Navigation Systems.
  • Robotics and Automation.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems

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