MEMS AND INTEGRATED MICROSYSTEMS TECHNOLOGY
Abstract
The MicroElectroMechanical Systems (MEMS) and Integrated Microsystems Technology project funds a broad, cross-disciplinary initiative to merge computation and power generation with sensing and actuation to realize a new technology for both perceiving and controlling weapons systems and battlefield environments. Using fabrication processes and materials similar to those used to make microelectronic devices, MEMS applies the advantages of miniaturization, multiple components and integrated microelectronics to the design and construction of integrated electromechanical and electro-chemical-mechanical systems. The MEMS program addresses issues ranging from the scaling of devices and physical forces to new organization and control strategies for distributed, high-density arrays of sensor and actuator elements. These issues include microscale precision, navigation, and timing systems as well as microscale components that survive harsh environments. These MEMS systems need to operate in a variety of thermal and vibration environments to make them tactically relevant.
Document Details
- Document Type
- Project
- Publication Date
- Oct 01, 2017
- Source ID
- MT-12_0603739E_3_0400_PB_2017
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