MEMS AND INTEGRATED MICROSYSTEMS TECHNOLOGY
Abstract
The MicroElectroMechanical Systems (MEMS) and Integrated Microsystems Technology project funded a broad, cross-disciplinary initiative to merge computation, power generation, sensing, and actuation to realize new technologies for perceiving and controlling weapons systems and battlefield environments. Using fabrication processes and materials similar to those used to make microelectronic devices, this project applied the advantages of miniaturization and integrated microelectronics to the design and construction of integrated electromechanical and electro-chemical-mechanical systems. The project addressed issues that ranged from the scaling of devices and physical forces to new organization and control strategies for distributed, high-density arrays of sensor and actuator elements. The resulting technologies could be applied to microscale precision, navigation, and timing systems; microscale components that survive harsh environments; and tactically-relevant MEMS systems that operate in a variety of thermal and vibration environments.
Document Details
- Document Type
- Project
- Publication Date
- Oct 01, 2018
- Source ID
- MT-12_0603739E_3_0400_PB_2018
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